Imaging sub-millimeter waves in planar cryoelectronic circuits by low temperature scanning laser microscopy D. Abraimov and A. V. Ustinov, Physikalisches Institut III, Universität Erlangen-Nürnberg, D-91058 Erlangen S. V. Shitov Institute of Radio Engineering and Electronics, Russian Academy of Science, Moscow, Russia Low temperature scanning laser microscopy (LTSLM) is shown to be capable of imaging the sub-THz electromagnetic fields in cryoelectronic integrated structures. This method allows to evaluate the spatial distribution of time-averaged field amplitudes with a resolution of about one micrometer on samples with passive and active superconducting structures with characteristic dimensions of the order of millimeters The principle of LTSLM is based on mapping the on-chip detector voltage response as a function of the position of a focused laser beam on the sample surface. The major effect is that a focused laser beam locally heats the sample and, therefore, introduces an additional dissipation in the area of few micrometers in diameter. Such a dissipative spot is scanned over the sample which electrical response (e.g., the detector current and voltage variation) is recorded as a function of the beam coordinate. Laser scanning of passive superconducting structures (striplines, slotlines, etc.) located on the chip contribute to the detector response due to extra losses for sub-millimeter waves propagating there. Using LTSLM, we have imaged complicated two-dimensional standing 500 GHz wave patterns in the integrated superconducting receiver chip developed by SRON (Groningen) in collaboration with IREE (Moscow).